A novel multisite silicon probe fabricated by using an economical wet etching process for high quality laminar neural recordings
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منابع مشابه
A novel multisite silicon probe for laminar neural recordings
Standard 3-inch <100> oriented 200-µm-thick p-type silicon wafers polished on both sides were used (Fig.4.) for the probe fabrication process that proceeded in several technological steps (Fig.5.). The pattern definiton consisted of various thin-film depositions to form the bottom insulating layers, the Pt electrode contacts and wires, the passivation layer, the contact holes and the bonding pa...
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ژورنال
عنوان ژورنال: Frontiers in Neuroscience
سال: 2010
ISSN: 1662-453X
DOI: 10.3389/conf.fnins.2010.10.00231